Novellus Brooks Sabre Robot Arm

02-116798-00, MOD CNTRL, P166/64 W/8COM 3 available

9 available

LOADLOCK INDEXER SERVO METER, SERVO-ENCODER-01

2 available Wafer size 6 inch Config Machine Type: PE-SiH4 (x1) Config Machine Type: TEOS (x1)

200mm Tungsten CVD

2 available

NOVELLUS, INOVA NEXT, 300mm

Installed and under working condition

Main Body Remote AC Sigma6 EGSS △−Y Trans ＜Gas Configuration＞ N2, SiH4, N2O, C2F6,O2, NH3, ...

200mm Refurb – ready for installation

300mm Condition: De-installed with missing parts