Novellus/ LAM Sabre XT Plating Tool
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As-is
- 3 open cassette load stations
- 5 anneal chambers
- 3 Electrofill Cells (Plating Cells...
2022 Novellus/ LAM Concept Two Speed NExT CVD 8"
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- Wafer Shape: Notch
- SMIF Interface: Yes
- Cassette Loader: LPI 2200
- Loadlock Indexer Robo...