RUDOLPH FE VII D is an ellipsometer designed for the characterization of thin films and surfaces....

The dual wavelength FE VII-SD is a production metrology tool built around a FOCUS ellipsometer. ...

200mm As-is

2007 Vintage

Parts machine 2008 Vintage

As is

2011 RUDOLPH MetaPulse-III 300XCu Metal Thickness WAFER SIZE: 12

2005 RUDOLPH AXI_S Inspection Defect Inspecion(Bump) WAFER SIZE: 12

RUDOLPH WV320 Wafer size: 300mm Process: measurement

FILM THICKNESS

C4 BUMP INSPECTION

Rudolph AutoEL Ellipsometer