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Wafer size: 200mm Process: PECVD 3x DXL, 8slotstorage

Wafer size: 150mm Process: PECVD 2x DXL, 8slotstorage

Wafer Size: 300 Process: Poly No EFEM: Buffer chamber : NO VHP robot 4 Process chamber (3x ...

Wafer Size: 200 Process: CVD 3x DLH chamber, 8 Slot storage, 3x OEM12B RF Generator

300mm Producer Ceramic Heater AMAT Certificate

300mm Producer Ceramic Heater AMAT Certificate

Technical Specification – Etch Tool System Model: LAM Rainbow XL (45xx Series) Specific Model: ...

The Clusterline 200 systems offeredis equipped with 5 single process chambers each. They were use...

Wafer size: 200mm Process: Inspection Review inspection. No Scope. No HDD.

Category: Metrology Maker: KLA Model: MIS-200 Wafer Size: 200 Process: Inspection Config Re...

2 available 2003 and 2013/pictures are vin2003 as representative

Wafer Size: 150 Process: W CVD 2x W CVD Chamber, Lamp Type 8 Slot storage2x W CVD Chamber, L...