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TEL ALPHA-303i
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12" LPCVD 2 available
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2007 TEL Lithius
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36 available 12" Coat/ Developer Vintage: 2007/ 2006/ 2005
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KLA-TENCOR SCD-XT
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12" Inspection/ measurement
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2000 AMAT Centura WxZ
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CVD
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2013 Samco RIE-331LC
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Dry Etcher 2013
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Disco DFD6341
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19 available Dicing saw
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Disco DFD6340
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Dicing saw 11 available
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Canon MAS-8000
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8" Stripper/ asher
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Ulvac SME-200
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PVD / Sputter
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AMAT Reflexion miniship LK
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12" CMP
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SEN NV-GSD-A-80
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8" Ion implanter
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Advantest T2000 AiR
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LSI/ IC tester
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