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1998 TEL Mark8
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SOG Coater. Tool status: connected Wafer size: 200mm Fab section: thin film Vintage: 1998 As...
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2007 AMAT G3 Lite
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Asset Description 461624.86 Software Version 5.3.10 CIM 10.93.22.120 Process Defect review sem...
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2014 LAM Research Corp. INOVA
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Vintage 2014 Wafer size: 300mm MDX83x, underutilized in FAB8, considered for FAB1 transfer Sof...
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2011 KLA AMI2900
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KLA AMI2900, 300mm KLA Advanced Macro Inspection Module Tool ID: AMI2900
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2002 RCS 300PS-M100
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Tool Status Running Wafers Wafer Size 300 mm Fab Section R&D Asset Description Semi Auto Pad S...
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HSEB Axiospect 301
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HSEB, Axiospect 301, Optical Microscope, 300mm Tool ID: OPI2900
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2010 KLA QTX-300
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Tool Status Connected Wafer Size 300 mm Fab Section Metrology Asset Description DQTX702 Softw...
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2012 Nanometrics UNIFIRE 7900-L
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Tool Status Connected Wafer Size 300 mm Fab Section Metrology Asset Description ICD2900-T ICD2...
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1999 CFM FullFlow 1/99 8100
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Tool Status Connected Wafer Size 200 mm Fab Section Clean Asset Description 8100 HP & Sulfuric...
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1999 CFM Technologies FullFlow 1/99 8100
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CFM FullFlow 1/99 8100 200mm HP & Sulfuric Ozone
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2004 RVSI ws3500/3800 upgrade
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Tool Status Disconnected Wafer Size 300 mm Fab Section Metrology Asset Description RVSI VISUAL...
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1988 CFM Technologies HP 8050
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CFM CFM HP 8050 200mm Hot Process (HP)
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