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Atmospheric Process Plasma (APP) System Atmospheric Process Plasma (APP) System with RFPT 600W 13.86mhz Rf power supply, and DX-VV auto match network
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ULVAC SIH-450
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VACUUM DEPOSITION SYSTEM
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CANON ANELVA L-045E
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VACUUM DEPOSITION SYSTEM
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NEC CAP-3000 II
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YEILD Yield Engineering (YES) model 3TA HMDS vapor prime oven
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CANON BCOS-V
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YEILD Yield Engineering YES-PB6-2P
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DAITRON DBM-603R
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DAITRON DPRS-302R
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WAFER SCRIBING MACHINE
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KOKUSAI ELECTRIC VR-70
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RESISTIVITY TEST SYSTEM
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JEOL JSW-2000
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USIO UX-4023SC
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LITHOGRAPHY SYSTEM
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