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Used Cambridge EBMF 10.5

e-beam lithography system as is

Used Nikon OPTIPHOT-300

12" WAFER AS IS

Used Hitachi S-6280H

AS IS

Used Kokusai DD1223VN

12" WAFER AS IS

Used Kokusai DD1223V

12" WAFER AS-IS

Used 1996 AMAT Centura HDP→5300Omega

As is, where is 2ch:SiO2 D/E CH-A/B Process Contact window dry etching Wafer Size 8” Wafer Sh...

Used Nikon OPTIPHOT 200

Metrology Wafer size: 8" Condition: as is

Used 1995 Canon FPA-2500i3

Stepper Wafer size: 6" Condition: as is

Used 2004 TEL Act 8

Config in images

Used Advantest T5371 and T5375 Tester Boards

Used Eagle ETS-364 Tester Boards (APU10,QMS,FSS,MPU,SPU100,and etc)

Used UFC LF150 Plasma