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2008 TEL Trias Ti/TiN System TEL MF CVD314-02
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2008 TEL Trias Ti/TiN System TEL MF CVD314-02 WAFER SIZE: 12
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TEL Trias TI/TiN-ALD MF CVD314-01A
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TEL Trias TI/TiN-ALD MF CVD314-01A WAFER SIZE: 12
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1998 Hitachi S-5000H
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1998 Hitachi S-5000H SEM
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DNS FC821L-L22, WCSS30
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DNS FC821L-L22, WCSS30 WAFER SIZE: 8
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2002 Suss Microtec Falcon
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2002 Suss Microtec Falcon Coat / Develop WAFER SIZE: 4, 5, 6, 8
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TEL Trias TiN Chamber CVD314-02B
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TEL Trias TiN Chamber CVD314-02B WAFER SIZE: 12
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TEL Trias TiN Chamber CVD314-02A
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TEL Trias TiN Chamber CVD314-02A WAFER SIZE: 12
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TEL Trias TI/TiN-ALD MF CVD314-01D
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TEL Trias TI/TiN-ALD MF CVD314-01D WAFER SIZE: 12
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TEL Trias TI/TiN-ALD MF CVD314-01C
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TEL Trias TI/TiN-ALD MF CVD314-01C WAFER SIZE: 12
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TEL Trias TI/TiN-ALD MF CVD314-01B
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TEL Trias TI/TiN-ALD MF CVD314-01B WAFER SIZE: 12
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2003 TEL Trias TI/TiN-ALD MF CVD314-01
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2003 TEL Trias TI/TiN-ALD MF CVD314-01 WAFER SIZE: 12
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Comet (7) R20 Transfer Station
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Comet (7) R20 Transfer Station WAFER SIZE: 6,8
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