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2 Process chamber system

Mxp chamber, Oxide, Clamp, GateV/V for Centura Frame

Mxp chamber, Oxide, Clamp, GateV/V for Centura Frame

Mxp chamber, Oxide, Clamp, GateV/V for Centura Frame

Mxp+ chamber, Oxide, ESC, gateV/V for Centura Frame

Classic, 1x Nit chamber. Not include dry Pump.

Classic, 1x Nit chamber. Not include dry Pump.

Classic, 1x Nit chamber. Not include dry Pump.

2x DXL PETEOS CVD. Not include dry Pump.

2x DXL PETEOS CVD. Not include dry Pump.

Ando AQ6310C Optical Spectrum Analyzer/Ando AQ-6002 Side-Mode Measuring Unit

The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The syst...