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Brewer Science CEE 4000 Wafer Track

Details

VCR Group IBS/TM200S Ion Beam Sputterer

Details

Kokusai DJ815V-8L LPCVD Silicon Nitride Reactor

Lithography

Lithography

Lithography

Wet Clean Station

Lithography

Lithography

Lithography

Metrology

Quench

Brewer Science CEE 4000 Wafer Track

VCR Group IBS/TM200S Ion Beam Sputterer

Kokusai DJ815V-8L LPCVD Silicon Nitride Reactor

Yield Engineering Systems YES-5E

Yield Engineering Systems YES-5

Yield Engineering Systems YES-5E

Taeyangtech Tyt-Pc

SVG 8800

SVG 8800

SVG 8800

Surftens Measurement

STL Sparrow