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KLA LCM-2
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Adv. LI scatterometry tool
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KLA ASET-F5/C4
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Thickness measure TRNSPRT, C4, 2NDUI
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KLA ARCHERC700WT
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Advanced reg cluster ready tool, IBO
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KLA ARCHER700WT
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Advanced reg tool, IBO
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KLA A500U
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Advanced reg tool, CU
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KLA A500SCOL
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Advanced reg tool, CU
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KLA A500SCOL
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Advanced reg tool
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KLA A500
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Advanced reg tool, CU
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1997 KLA 1007 TESTING TEST
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2011 KLA AMI2900
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KLA AMI2900, 300mm KLA Advanced Macro Inspection Module Tool ID: AMI2900
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2010 KLA QTX-300
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Tool Status Connected Wafer Size 300 mm Fab Section Metrology Asset Description DQTX702 Softw...
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1994 KLA Surfscan 6200 Particle Counter
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8" - 0.1 micron Defect Sensitivity (PSL STD) - 0.02 ppm Haze Sensitivity - 0.002 ppm Haze Reso...
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