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Ulvac SRH-420
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6 available 6" PVD/ sputter
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Advantest T6577
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LSI / IC Tester 9 available Vintage: 2006 (x1), rest unknown
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LAM V2-Exelan/TECO1.5_VCR
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2 available Dry etcher
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LAM V2 Kiyo CX
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Dry etcher 2 available
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KLA SP2
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Inspection / Measurement 2 available
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Canon FPA-5510 iZ
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Coat/ developer 5 available Stepper/ scanner
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AMAT Vantage AP
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Annealer/ RTA/ RTP
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KLA- Tencor SP1-TBI
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Inspection/ measurement 8"
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Axcelis NV-GSD III
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Description Dimension End station 110x94x92 Analyzer, Power rack 50x37x89 Source teminal 48x69...
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Keysight 4073A
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12" Parametric tester
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Canon FPA-6000 ES5a
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3 available Stepper/ scanner
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Eaton NV-GSD-HE
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End station 115 x 94 x 98 Beam line 52 x 96 x 94 Source teminal 59 x 60 x 89 Source housing 66...
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