- Gas boxes: 2 populated out of 4 available - Process chamber: 5200 WxZ CVD - Mainframe

- 3 Phase - 400V - 50/60 Hz - DA 300 Module included 2004 Vintage Warehoused Complete Work...

Electric Power: - Voltage: 400V 3-phase + N + PE - Power: 16 kVA - Frequency: 50 Hz - AIC: 100 k...

Year of Manufacture: 2022 Condition: Like New Sold as-is

Used SUPPLY VOLTAGE 208-240VAC Comes from a previously working machine, very good condition

As is //8 but in //4 config [SLK] Rotator included ESD Class 0 DDD with Fibre 2007 vintage

As is //8 but in //4 config [SLK] Rotator included ESD Class 0 DDD with Fibre 2015 vintage

3 available 8" 1997/ 1994/ -

8" LSI/ IC tester

8" Inspection/ measurement

2009 8" Ion implanter