FIA AF Sensor Unit (PCB 4S007-663)

Oscillation Mirror Unit

Temp Sensor ( IATC etc )

TDK Power Supply ( 100-240V ~ 5.6 - 2.8A 50/60Hz )

Yamatake Honeywell Controller SDC40

Reticle Microscope Drive Assembly ( X2, Theta )

Mitsubishi Programmable Controller

Wafer Stage Flat Cables

ALCP Sensor Box

Load/Unload Slider Assembly

ADE 4C1C Amp ( Z STAGE )

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