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EBARA TURBO PUMP COTROLLER
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ION GAUGE
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Wafer Transfer Comet 6 inch
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Electrotech PECVD ND 3
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ELECTROTECH PECVD DEP SiN-SiC (Sio2) Gases used: CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4
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VACUUM PUMP
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WALLACE HIGH VOLTAGE SWITCH (GREY)
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