KLA-TENCOR Surfscan 5500

- Model 5500 Main System

- Can handle from 2" up to 8"/200mm wafers

- Submicron sensitivity, detects 0.2 micron particles

- Surface haze detected as low as 0.3 ppm.

- Handles high scattering surfaces such as metals, polysilicon and cvd films.

- Map locations and size available for each particle.

- Fully refurbished to meet original Surfscan 5500 specifications

- Operations Manual for KLA Surfscan 5500

Refurbished to Factory Specifications consisting of:

- New Laser

- New Belts

- Clean or Replace Optics and Mirrors

- System calibrated to KLA specifications with NIST Calibration Standard

- Optics Alignment

- Indexer sensor replacement

- Vacuum line change out

- New 17" LCD Monitor