2001 TEL ACT-12 I-LINE System Clean Track System

2 available

https://www.tarasemi.com/listings/7667596-used-2003-tel-act-12-local-system-clean-track-system

Further details in images

1. DESCRIPTION

1-1. Number of Machine : E210318

1-2. Left to Right

1-3. MODEL : Clean track ACT-12

1-4. WAFER & CARRIER TYPE : 12", FOUP, 25 Slots

1-5. System Power Rating : AC 208V , 3-Phase for System

1-6. Loading Configuration : 4 Loader

1-7.Software Version : 3.04.126

1-8.Main controller : #3 Controller

2. Main system

1)Main frame with system controller

2) Carrier station

- Type: FOUP Cassette Type

- 4 Cassette Stage

3) Coater unit

- 8 dispense nozzle with temperature controlled lines for etch unit

- RDS Pump

- Rinse nozzle : back/ EBR / solvent bath for etch unit

- Chemical system : PCS Auto Exchange system

- P.R Suck-back Valve Type : Digital Suck-back valve

- Programmable side rinse

- Drain: Local pump drain

4) Barc Coater unit

- 4 dispense nozzle with temperature controlled lines for etch unit

- RDS Pump

- Rinse nozzle : back/ EBR / solvent bath for etch unit

- Chemical system : PCS Auto Exchange system

- P.R Suck-back Valve Type : Air ope Suck-back valve

- Programmable side rinse

- Drain: Local pump drain

5) NEW Developer unit

- NLD nozzle for each unit

- 1 stream nozzle for DI rinse and 1 points for back side rinse on each unit

- Chemical system : PCS Auto Exchange system

- Developer temperature control system

- Drain: Rear direct drain

6) InterFace type : Normal type

7) Adhesion Unit 2EA

- 100% sealing closed chamber(Built-in hot plate)

- HMDS tank with float sensor in system

8) Low Temperature Hot Plate Process Station (LHP) 5EA

9) High Temperature Hot Plate Process Station (HHP) 4EA

10) Chill Plates (CPL) 9EA

11) Precision Chilling Hot Plate Process Station (PHP) 10EA

12) TCP Module 1EA

13) TRS Module 2EA

14) Chemical Cabinet #1 : PR

15) Chemical Cabinet #2 : HMDS, SOLVENT

16) Chemical Cabinet #3 : DEV & DI

17) Temperature&Humidity controller 2EA

- Type: SYSTEM T&H

18) TEMP Control Unit(TCU) 1EA

19) AC Power Box