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LAM Concept Three Speed
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1999 CVD
Details
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1998 LAM 9600 BRME
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200mm
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2016 LAM SEZ SP304
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Consisting of the main unit, 3 chemical cabinets and sub-equipment Description SEZ 304 Wafer Si...
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LAM Torus300
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Wafer size: 300mm Process: Bevel etch EFEM, BROOKS ATM Robot
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2011 Lam Rainbow 4500B XL 150mm Plasma Etch
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Technical Specification – Etch Tool System Model: LAM Rainbow XL (45xx Series) Specific Model: ...
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LAM 490B
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Qty: 2 490 Plasma Etcher w/ ENI OEM-6M-01, M&W Chiller Sold As Is
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1999 LAM TCP 9600
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LAM Research TCP 9600 - without UI Computer - Envision, ESC, Fixed Gap Wafer Size Range Set S...
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1994 LAM Rainbow 4520 XL
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- without UI Computer, Chiller and Pump - Generatorrack with 2 Generatoren 2MHz und 27MHz (135kg...
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2004 LAM Allian
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Wafer Size Range Minimum 150 mm Maximum 200 mm Set Size 200 mm Number of Chambers 0 Process Ca...
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2008 LAM 2300 Kiyo
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Semiconductor ETC Chamber with RF Cart Incl. Gasbox and Rocker Valve In production until Januar...
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2000 LAM Rainbow 4526XL
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LAM Rainbow 4526XL - Plasma Etch Current tool status: Deinstalled, foil wrapped and stored in wa...
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LAM Rainbow 4528XL
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LAM Rainbow 4528XL - Plasma Etch Current tool status: Deinstalled, foil wrapped and stored in wa...
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