Installed. Unused Since Installation/Qualification However, since it has been stored under cons...

Wafer size 12 inch Config Main Frame / Vector Express Process chamber( PEOX Process ) Note 2 Lo...

Wafer size 12 inch Main Frame / Vector Express Process chamber( ARC Process ) 3 Load Port, ATM ...

Wafer size 12 inch Main Frame / Vector Express Process chamber( SION Process ) 2 Load Port, AT...

Lam Research 9600SE Rainbow Metal Etch Tool - Rainbow Configuration Includes Post-Etch PR Strip ...

2 available Dry etcher

Dry etcher 2 available

1999 CVD

200mm

Consisting of the main unit, 3 chemical cabinets and sub-equipment Description SEZ 304 Wafer Si...

Wafer size: 300mm Process: Bevel etch EFEM, BROOKS ATM Robot

Technical Specification – Etch Tool System Model: LAM Rainbow XL (45xx Series) Specific Model: ...