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2021 LAM Research Corp. SOLA
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LAM VEXL SOLA MOD.
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2012 LAM Research Corp. 2300 E4
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Other Plasma Processing Equipment and Tools
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2014 LAM Research Corp. INOVA
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Vintage 2014 Wafer size: 300mm MDX83x, underutilized in FAB8, considered for FAB1 transfer Sof...
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2011 LAM Research Corp. Vector Express
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Vintage 2011 (multiple units available) Wafer size: 300mm Software version: 6.07B93_2.30B36 CI...
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