Condition Refurbished as is Wafer Size: 6 Inch Vintage 1994

- 1 chamber - Dielectric - Nitride/TEOS - Ver. 4.431 ECO 4.43 - Pump: 1ea, Ebara, A10S - Loa...

Currently Configured for 300mm wafer size Further config. in attachment

/ HEATER BLK, 150MM 6-INCH OD PINNED / NOVELLUS

Working condition 200MM, PVD SYSTEM (1) DEGAS CHAMBER (1) DAMACLEAN ETCH MODULE (1) TA PVD CH...

Used, looks complete, very clean Novellus Inova XT PVD 300mm wafer, Sputter, Preclean, Dual Broo...

1994 NOVELLUS MB2 Wafer size: 200mm Process: metal WAFER SIZE: 200mm

We have attached list of NOVELLUS Spare parts in stock in Ireland , we can sell individual parts ...

- Condition: complete, removed from Fab in working condition - wafer size: 200mm

parts, chamber only

Robot as is