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Oxford Plasmalab 80 Plus PECVD tools
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2x available PECVD 80+ SiO2 Dep - Non-functional tool but can be repaired (requires Silane MFC) -...
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Oxford Plasmalab100 PECVD Etchers Ashers
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Working Overhaul Complete
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1995 Oxford Plasmalab SLR 720 RIE
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Single chamber Plasmatherm SLR 720 RIE. It's got a load locked chamber, upgraded PC, turbo pump, ...
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Oxford Plasmalab ICP380 along with Oxford Plasmalab100 ICP Etcher 100 RIE+PECVD
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Working Conditon Vintage : 2013 Complete
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Oxford Plasmalab100 ICP Etcher+PECVD
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Working Condition
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Oxford Plasmalab 80 Plus PECVD
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As is 200mm
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Oxford Plasmalab100
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RIE
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Oxford Aztec X-Max 80T
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Oxford Aztec X-Max 80T
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Oxford Plasmlab 800 Plus
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Oxford Plasmlab 800 Plus
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