Deep silicon etcher

Installed and in working condition Etched: SiO2, quartz, Pyrex, fused silica, Si3N4, bulk silico...

Vintage: 1998 Wafer size: 6", 8" Condition: as is

STS HR

Wafer Size: 6.0

Wafer Size: 6.0

PECVD 6 inch Gases used: CF4-O2-Ar-N2-SiH4-NH3-5%SiH4/AR-CH4

Deep Si Etch

STS Systems Model 320PC Controller Type PC Controller Type End Point Detection 2ea Verity End Poi...