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Name: Tara Semiconductor Technology
Telephone: +353 (0) 87 192 1110

PECVD 6 inch Gases used: CF4-O2-Ar-N2-SiH4-NH3-5%SiH4/AR-CH4

Deep Si Etch

PECVD

STS Systems Model 320PC Controller Type PC Controller Type End Point Detection 2ea Verity End Poi...