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2002 STS Advanced Silicon DRIE Etch
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STS Advanced Silicon DRIE Etch 2002 Vintage
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STS AOE Dielectric ICP Etcher
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STS AOE Dielectric ICP Etcher - 400 V - 50 Hz
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2001 STS Dielectric PECVD
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STS Dielectric PECVD - 50 Hz - 400 Volts 2001 Vintage
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STS Multiplex ICP Etcher
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Metal Cluster
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2001 STS Multiplex CVD 100mm
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The tool is currently operational and in good condition. Year 2001 Multiplex single chamber PEC...
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STS MULTIPLEX CLUSTER SYSTEM SILICON DRY ETCH
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Equipment for Nozzle Plate only
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1989 STS PC 1 STS PC 310 DEP SIC
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STS 308PC Barrel asher
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1998 STS Multiplex CVD
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Including all Accessories, Vacuum pump etc
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2001 STS MESC Multiplex ICP ASE
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STS ASE Multiplex ICP System (Bosch Process) OEM = Surface Technology Systems Limited (AKA: STS)...
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2005 STS ICP PRO HRM Etcher
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150mm Bosch process STS Loadlock Chamber Loader with Robot for cassette to cassette operation ...
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1998 STS MESC Multiplex ICP Process Chamber
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- 200V, 60Hz, 40A 1998 Vintage
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