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2007 FSM FSM FSM413 wafer thickness measurement tool
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Gasonics PEP 3510 Plus
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Lam / Novellus / Gasonics PEP 3510 Plus - 2 KW MW Generator
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THERMOFISHER SCIENTIFIC / FEI / PHILLIPS QUANTA 600 FEG
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Detectors: SE, BSE, GSE, Chamber scope Stage: hot and cold (2) Scroll pumps
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LAM/ Novellus VECTOR
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6 available PECVD (Chemical Vapor Deposition) Deposition Equipment 300mm
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KULICKE AND SOFFA INDUSTRIES 8028 PPS
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U BALL BONDER, NO MHS, LAB USE
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KOKUSAI Quixace II Alloy
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2 available 300mm Vertical Furnace Furnaces/Diffusion Systems
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KLA ALERIS 8350
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Thin films measurement tool, 190, NC
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KLA ALERIS 8350
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Thin films measurement tool; CU
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KLA EDR7200I
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2 available REVIEW STATION, CU 300mm
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KLA-Tencor Corp. Surfscan SP2.5+
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3 available Particle Measurement Metrology Equipment Currently Configured for: 300mm Asset HD...
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KLA-Tencor Corp. Archer AIM+
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Overlay Measurement System Metrology Equipment Currently Configured for: 300mm Asset HDD not i...
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KLA HRP340-E
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HRP340-E
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