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Ulvac SME-200
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PVD / Sputter
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AMAT Reflexion miniship LK
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12" CMP
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SEN NV-GSD-A-80
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8" Ion implanter
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Advantest T2000 AiR
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LSI/ IC tester
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TEL UNITY EP
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CVD
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SAMCO RIE-230LC
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Dry etcher
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2008 TERADYNE MicroFlex
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3 available Vintage: 2008(x1), 2 unknown
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Teradyne J750
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3 available LSI / IC Tester
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METRYX Mentor DF3-SE
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12" Inspection/ measurement
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Agilent Technologies (HP) 4072B
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8" Parametric tester
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CANNON BCOS-JR
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UV Cure / UV Bake
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Suss PM5 manual prober with Mitutoyo FS60 microscope and (2) PH500 micropositioners, 150mm vacuum chuck
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6" vacuum chuck Pair PH500 micropositioners with vacuum base Optional Kinetic Vibration isolati...
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