2000 TEL ACT8 Coater Developer Dual Block 3c3d
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AC Power box x1 T&H x2 TCU x1 Chemical Cabinet x2 200mm Complete Installed for 0.25um
1996 ASML PAS 5500 /250C
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i-Line stepper Installed S/W 8.8.6.c WAFER SIZE: 200mm
TEL Lithius 1+ (ArF immersion track)
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TEL Lithius 1+ (ArF immersion track)
2008 Vintage
300 mm wafers
Software version 300.0.71.3
S...
2008 Suss Microtec Gamma
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Tool # LPRCM-02 Serial # GAMMA-0116 2C/1D 5 HP/2CP
TEL ACT8 2C1D Coater Developer
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Negative type polyimide specification
Selling as is where is
Currently in the fab
The buyer is...
1995 TEL MARK 7 1C2D
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Wafer Size: 8-inch
Year of Manufacture: 1995
General Configuration
a. Wafer Size: 200mm, Singl...
DNS SC-W80A-W/AVF SOG Coater
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SOG Spin Coat
L Configuration - Load on the Left, Cure Furnace on the Right
25 Slot Cassette
O...
2004 TEL Act 12
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Main Controller Type: NA
Wafer Flow: Right to Left
Configuration
2) Missing Parts List: No CSE...










