Programmable Controller, for 200mm XY Stage

Offline Review Station, forup to 200mm Wafers

193nm IMMERSION METROLOGY REPAIR

AERIAL IMAGE MEASUREMENT SYSTEM

THERMAL DISTORTION SPECTROMETER

X-RAY PHOTOELECTRON SPECTROMETER

CD OPTICAL MEASURE

NEAR INFRRED EMMISIONS MICROSCOPE

Resistivity test system

Metrology

Metrology

Wet Station