- Single Wafer Process - Single Rotometer Controlled Gas Channel - Multi-Step Process Cycle Capab...

12" As-is Batch wafer processing

NOVELLUS, INOVA NEXT, 300mm

AXCELIS, AXCELIS INTEGRA ES 3CH / INT340 NH3 Plasmastrip

2003 Comet Wafer Transfer Spare Parts

Entegris, FOUP N2 Purge Station, 300mm

Semi Auto

EBARA F-REX300, 300 mm, Cu CMP Polish Tool ID: ED05

TEL/FSI Orion, 300mm, DYD2 Tool ID: DYD2