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AMAT Centura 5200
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- Gas boxes: 2 populated out of 4 available - Process chamber: 5200 WxZ CVD - Mainframe
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AMAT Centura Spare Parts
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2004 AMAT ENDURA HP
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8" PVD/ sputter
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AMAT Centura RTP
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8" Annealer/ RTA/ RTP
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AMAT Producer GT Chamber (Pre-Clean Siconi)
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Wafer size: 300mm Process: SiCoNi RPS: FI20620-1 x2ea RF Generator: APRX3013 AE 12" Missing P...
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2005 AMAT Centura AP-DPS
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AMAT Centura AP-DPS 2005 12" Dry etcher
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2007 AMAT Centura-DPS
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2007 AMAT Centura-DPS 12" WAFER SIZE: 12
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1992 AMAT P5000
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Metal etch 6" As-is
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AMAT Centura DPS+ POLY
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6" As-is
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AMAT Centura DPS Metal
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6" As-is
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1996 AMAT CenturaHDP→5300Omega
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2ch:SiO2 D/E CH-A/B Wafer size: 8" Condition: as is Dry etch
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2004 AMAT CENTURA ETCH ENABLER 300 2
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As-is 12"
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