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300mm Polysilicon Etch Etch/Ash/Clean - Plasma Processing

Lam / Novellus / Gasonics PEP 3510 Plus - 2 KW MW Generator

Detectors: SE, BSE, GSE, Chamber scope Stage: hot and cold (2) Scroll pumps

6 available PECVD (Chemical Vapor Deposition) Deposition Equipment 300mm

U BALL BONDER, NO MHS, LAB USE

2 available 300mm Vertical Furnace Furnaces/Diffusion Systems

2 available 300mm Critical Dimension (CD) Measurement (non SEM) Metrology Equipment Asset HDD...

Thin films measurement tool, 190, NC

Thin films measurement tool; CU

2 available REVIEW STATION, CU 300mm

3 available Particle Measurement Metrology Equipment Currently Configured for: 300mm Asset HD...