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193NM IMMERSION SCANNER

248 SCANNER, CU

MICRO/MACRO INSP SCOPE, CU

2 available x1 Tester x1 Tester (for YA lab)

QV STREAM

WAFER INSPECT AND DEFECT MEASUREMENT

EUV MASK BACKSIDE REPAIR SYSTEM

Cure, CU

B etcher, CU

E6 6PM KIYO FX/GX HYBRID, CU

2 available 1x oxide, cu 1x furnace

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