Etch/Ash - Other Etch/Ash for sale at Tara Semiconductor Technology

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Used 1998 TEGAL 901e ETCH SIN SIC

Used 2006 STS / SPTS CPX Pegasus

Refurbished Condition 2024 200mm wafer size 2 Chamber Volts/Hz/Ph: 380Volts/60Hz, 160 Amps/pha...

Used Ramco RAM8500

Asher 8" As-is

Used 1996 TEGAL 903e ETCH SIO2

Used Hitachi M-308ATE Metal Etch System w/ Power Rack, Delatech 858 V-2 scrubber, Gas Cabinet

Parts tool Used

Used Axcelis / Fusion 200 MCU Asher

8 Inch set up

Used Axcelis Fusion G03 Ozone Asher. Dual chamber, Dual robot arm

8inch wafer Used

Used Verteq Wet Bench Nitride Etch, robot arm

Used, looks complete, very clean 8" wafer

Used Verteq Wet Bench Oxide Etch, robot arm

Used, looks complete, very clean 8 inch wafer

Used Mattson Process chambers Module with New power plasma RPS Qty = 2

Used, chamber only

Used LAM 490 (LAM AUTO ETCHER) computer Base, RF Generator, Chiller

Used, looks complete, very clean 6INCH WAFER

Used LAM 490 (LAM AUTO ETCHER) computer Base, RF Generator, Chiller

Used, looks complete, very clean 6INCH WAFER