1999 LAM TCP9600 Metal Etch
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TCP9600 Metal Etch 200mm Configuration
Install Type: Stand-Alone/Ballroom SMIF System
SW: Envis...
LAM Sabre Extreme Cu Anodes (new in the packages)
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Brand-new in the box/packages Cu (ultra purity) Anodes
- Used in Lam Sabre Extreme Systems
- Dam...
2026 LAM Sabre Extreme systems, using Damascene Cu plating process.
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Lam Sabre Extreme systems, using Damascene Cu plating process
TI, GF, SMIC, Micron, TSMC, etc.
...
2015 LAM Altus Max with PNL
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Current tool status: in production
Tool working condition: working
Tool Model
C3ADFMAX
Proces...
LAM TCP 9600SE
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Metal Etch
Etch/Ash/Clean - Plasma Processing
Currently Configured for: 150mm
Install TypeThro...
LAM TCP 9600SE
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Metal Etch
Etch/Ash/Clean - Plasma Processing
Currently Configured for: 150mm
Install TypeStan...
2023 LAM 2300 3 Chambers Etch System Including Exelan Flex45 Dielectric Etch Chamber
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Installed.
Unused Since Installation/Qualification
However, since it has been stored under cons...
2011 LAM VECTOR EXPRESS
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Wafer size 12 inch
Config Main Frame / Vector Express Process chamber( PEOX Process )
Note 2 Lo...
2010 LAM VECTOR EXPRESS
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Wafer size 12 inch
Main Frame / Vector Express Process chamber( ARC Process )
3 Load Port, ATM ...