EFEM: Kawasaki ATM Robot Buffer chamber : NO VHP robot 4 Process chamber (3x DPS II, 1x Axiom) ...

PECVD With four DLH chambers

Category: Etch Maker: AMAT Model: Axiom Chamber Wafer Size: 300 Process: Ashing Config Axio...

200mm with 2 MxP+ poly chambers

Mark II Metal 6" 2C/H As is no critical missing

For 200 mm Wafers *HP Robot *2 TAN Ox Chambers Still on the Tool *Convertible to RTP with XE+ ...

It is missing the HDD It is missing all the lamps for one of the chambers

As Is The Oriental Chamber will be excluded.

As-is, where-is, condition Basic configuration: SMIF/Non-SMIF type ■SMIF □Non-SMIF Wafer Size ...

Vintage = 2011 Process = RTP TCPP mainframe 200 mm SNNF 2 ea Tantalum oxide RTP process chamb...