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2002 ATV Technologie GmbH PEO-603
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Horizontal Furnace Furnaces/Diffusion Systems Date of Manufacture: 2002-12-31 Currently Config...
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2011 ATV Technologie GmbH PEO-603
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Horizontal Furnace Furnaces/Diffusion Systems Date of Manufacture: 2011-12-31 Currently Config...
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1994 ATV Technologie GmbH PEO 602
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This furnace can handle wafers up to 150mm Configuration: N2 - 1500 l/min N2 - 660 l/min Form...
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