2002 ATV Technologie GmbH PEO-603
Contact us for price
Horizontal Furnace
Furnaces/Diffusion Systems
Date of Manufacture: 2002-12-31
Currently Config...
2011 ATV Technologie GmbH PEO-603
Contact us for price
Horizontal Furnace
Furnaces/Diffusion Systems
Date of Manufacture: 2011-12-31
Currently Config...
1994 ATV Technologie GmbH PEO 602
Contact us for price
This furnace can handle wafers up to 150mm
Configuration:
N2 - 1500 l/min
N2 - 660 l/min
Form...