VINTAGE : MAR.1997 WAFER SIZE: 8 INCH PROGRESS TYPE: WET/ CMP COMPONENT : MAINFRAME CHEMICAL C...

Wet Process / Scrubber / 12" 4 Chamber Station. NH4OH, H2O2 3xLP Selling as-is where-is

Scrubber 8" As-is

6" As-is Wet station

8" As-is

5 available 300mm

DNS FC 3100 Configuration: HF>SC1>SC2>SPM>LPD Installed

Process Application Batch Wafer Wet Processing Wafer Size 200mm System Details Main Power: 2...

Scrubber

DNS SK-200 Coat Develop track 200mm As-is, where-is WAFER SIZE: 200MM