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Vacuum: Alcatel coarse pump + diffusion pump Vacuum chamber: volume like Balzers BAK 600 Electr...

ELECTROTECH PECVD DEP SiN-SiC (Sio2) Wafer Size: 6 Inch Gases Used: CF4-O2-Ar-N2-N2O-SiH4-NH3-5%S...

ELECTROTECH PECVD DEP SiN-SiC (Sio2) Gas Supply: CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4

ELECTROTECH PECVD DEP SiN-SiC (Sio2) Gases Used CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4

ELECTROTECH PECVD DEP SiN-SiC (Sio2) Gases used: CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4