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Mattson ICP or Tride
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PR stripper
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1999 Mattson AST 2800
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Description AST SUPER HEAT SYSTEM Year of Manufacture 1999 Tool Status Connected Wafer Size 20...
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Mattson Rear Chamber Assembly
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Mattson Rear Chamber Assembly, New Power Plasma, Unit, Brooks Parts
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Mattson Aspen III, Front End Transfer Chamber, Robot, Controller
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Used, parts, Transfer module 12" wafer
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Mattson Aspen II
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Stripper (2) ASYST SMIF System extended reaches (2) Resist strip chambers (2) RF10S Generators...
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2012 Mattson MILLIOS HVM
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Tool Status Connected Wafer Size 300 mm Fab Section Diffusion Software Version 1.22.1.6C CIM ...
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1994 Mattson Aspen II
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Mattson Aspen II ICP Dual chamber. ICP System, 8" MATTSON Endpoint detection system With fixed...
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Mattson AE RF30S RF
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Mattson Hydrilis Suprema
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- Wafer Size: 300 - Group: Electronic - Category: Semiconductor Fabrication - Family: Etch Equipm...
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2011 MATTSON PARADIGM_SI
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MATTSON PARADIGM_SI VINTAGE AVAILABLE 2011 + 2012 Wafer size: 300mm WAFER SIZE: 300MM
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Mattson Process chambers Module with New power plasma RPS Qty = 2
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Used, chamber only
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Mattson Process chambers Module with LF10 and RF30S RF generators qty =8
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Used, Chamber only
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