1995 Tokyo Electron Ltd. (TEL) CLEAN TRACK MARK 8 MULTI BLOCK
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Multi Block (Resist Coater/Developer)
Resist Processing Equipment
Date of Manufacture: 1995-12-...
1997 Tokyo Electron Ltd. (TEL) ALPHA-8S ATM OXIDE
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TEL Alpha-8S Oxide ATM Furnace System
Install Type: Through-the-wall
System Status: On-Line (op...
1997 Tokyo Electron Ltd. (TEL) ALPHA-8S ATM OXIDE
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Vertical Furnace
Furnaces/Diffusion Systems
Date of Manufacture: 1997-12-31
Currently Configur...
Tokyo Electron Ltd. (TEL) ALPHA-8S ATM OXIDE
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Vertical Furnace
Furnaces/Diffusion Systems
Currently Configured for: 200mm
Install Type Throu...