ULVAC Evaporator ei-7k 1. Main Body 2. Controller Unit As-is

6 available 6" PVD/ sputter

PVD / Sputter

Vintage: 2005 Wafer size: 6" Evaporation Max temp: 450 deg. Celsius

• 3-station process module (P1, P2, P3) • 5 kW pulsed DC power supply • P3 dedicated to ITO or ...

• 3-station process module (P1, P2, P3) • 5 kW pulsed DC power supply • P3 dedicated to ITO or ...

- With process gases BCl₃, Cl₂, SiCl₄, CF₄, SF₆, C₄F₈, O₂, and Ar, this versatile ICP etcher is d...

PVD Wafer transfer

Vintage 2012 Wafer size: 300mm . Load Module - Load Port - Robot Arm . Transfer Module - Ro...

MATX, Cu

Tool running in FAB, will be de-installed in August.

Dry vacuum pump Set: 7