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Ulvac Zi-1000N
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PVD Wafer transfer
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2012 ULVAC ENTRON-EX W300
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Vintage 2012 Wafer size: 300mm . Load Module - Load Port - Robot Arm . Transfer Module - Ro...
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Ulvac Entron Ex
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MATX, Cu
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Ulvac Zi-1000 PVD 6 Inch
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Tool running in FAB, will be de-installed in August.
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Ulvac LR1800
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Dry vacuum pump Set: 7
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Ulvac LR180
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Dry vacuum pump Set: 4
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CRYO GENETICS COMPRESSOR Set: 8
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Ulvac CRYO-U12HSP
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CRYO PUMP Set: 4
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Ulvac 3301FH / D3A
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TURBO MOLECULAR PUMP Set: 4
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Ulvac 3301FW / D3A
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TURBO MOLECULAR PUMP Set: 8
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ULVAC ULVAC ENTRON W-200 ULV1000X-400 MS-IVA PCB CTRL KRC4000Z ROBOT CTRL
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