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2025 METRYX Mentor DF3
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300mm
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2012 Mattson MILLIOS HVM
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Tool Status Connected Wafer Size 300 mm Fab Section Diffusion Software Version 1.22.1.6C CIM ...
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1997 Tokyo Electron Ltd. (TEL) ALPHA-8S ATM OXIDE
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TEL Alpha-8S Oxide ATM Furnace System Install Type: Through-the-wall System Status: On-Line (op...
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1998 Mattson Technology SHS 2800-SMIF
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200mm
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2001 Lintec RAD-2500M/8
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200mm/8" wafer mounter Tool Status Disconnected Wafer Size 200 mm Fab Section Lab Asset Descr...
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2013 NOVELLUS INOVA NEXT
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NOVELLUS, INOVA NEXT, 300mm
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2021 LAM Research Corp. SOLA
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LAM VEXL SOLA MOD.
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1998 LAM 9600 BRME
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200mm
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2012 LAM Research Corp. 2300 E4
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Other Plasma Processing Equipment and Tools
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2013 KOBELCO HRBS
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High Resolution Rutherford Backscattering
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2010 KLA-Tencor EDR 5210
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3 available Vintage:2010 (x3) Tool Status Disconnected Wafer Size 300 mm Fab Section Metrolog...
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2014 Votsch VC 4018
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Vötsch VC³ 4018 Climate Test Chamber (2014) –40°C to +180°C – Tested Excellent condition Full...
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