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2009 KLA SUN Microsystems
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Offline defect review station
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2013 KLA SpectraShape 9010
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300mm
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Suss MA200E Mask Aligner
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SUSS MA200e Mask Aligner consisting of: - Windows based with Suss AL 900 / Autoalign System - T...
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2009 KLA- Tencor ASET-F5x
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4 available 300mm Vintage: 2005 2006 2008 2009
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KLA AITXUV
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5 available 300mm Vintage: 2006 (2) 2005 (3)
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2014 Jeol JEM ARM-200CF
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Transmission Electron Microscope
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2001 INSTRON 5564
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INSTRON, 5564 Pull Tester
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2007 HSEB MMT300 V2
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300mm
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2007 HSEB MMT 300
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300mm
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2004 HSEB Axiospect 300
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4 available 300mm Vintage: 2004 (2) 2001 (2)
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2006 HMI ESCAN380
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300mm
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2001 Hitachi S-9220
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200mm CD Measurement
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