VINTAGE : MAR.1997 WAFER SIZE: 8 INCH PROGRESS TYPE: WET/ CMP COMPONENT : MAINFRAME CHEMICAL C...

Comes with 4 W chambers VINTAGE : 1999 WAFER SIZE: 8 INCH PROCESS TYPE: TUNGSTEN FACTORY INTE...

2 available Wafer scrubber

Ion implanter

6 available 6" PVD/ sputter

LSI / IC Tester 9 available Vintage: 2006 (x1), rest unknown

2 available Dry etcher

Dry etcher 2 available

Inspection / Measurement 2 available

Coat/ developer 5 available Stepper/ scanner

Annealer/ RTA/ RTP

12" Parametric tester