KLA-Tencor Corp. Surfscan SP2.5+
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3 available
Particle Measurement
Metrology Equipment
Currently Configured for: 300mm
Asset HD...
KLA-Tencor Corp. Archer AIM+
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Overlay Measurement System
Metrology Equipment
Currently Configured for: 300mm
Asset HDD not i...
KLA ZSS ATL150I
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Advanced reg tool, IBO
300mm
Overlay Measurement System
Metrology Equipment
Asset HDD not inc...
KLA-Tencor Corp. SL300 URSA
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300mm Reticle Inspection Reticle/Photomask Equipment Asset HDD not included
EVG 101 Spin/Spray coater
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Spin coating system has been upgraded to a spray coating capability system
There are no known is...
KLA-Tencor Corp. SpectraShape 9000
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4 available 300mm Overlay Measurement System Metrology Equipment Asset HDD not included
KLA-Tencor Corp. Archer 200 AIM
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5 available 300mm Overlay Measurement System Metrology Equipment Asset HDD not included
Keysight / Agilent / Hewlett-Packard (HP) 4072B ADVANCED
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2 available PARAMETRIC TESTER E-TEST, CU 300mm Parametric Tester Automated Test Equipment (ATE)
AMAT VeritySEM 6i
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300mm SEM - Critical Dimension (CD) Measurement Metrology Equipment Asset HDD not included
AMAT Producer GT TiN MCVD
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300mm Metal CVD (Chemical Vapor Deposition) Deposition Equipment Asset HDD not included
AMAT ALTA 4700i
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300mm Laser Beam Mask Writing System Reticle/Photomask Equipment Asset HDD not included

