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2003 LAM Concept-Two Inova
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Vintage: 2003 (1) 2001 (2) Wafer size: 8" Configuration overview: 2ch HCM Ta(N)PVD: 1ch HCM C...
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2002 TEL P-8XL
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Vintage: 2002 Wafer size: 8" Configuration overview: frame Process overview: prober Tool stat...
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2003 TSK UF-200
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Vintage: 2001 (1) 2002 (1) 2003 (2) Wafer size: 8" Configuration overview: frame Process ov...
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2001 Screen SK-80BW-AVQ
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Vintage: 2001 Wafer size: 8" Configuration overview: frame Process overview: photo track Tool...
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2001 TEL CLEAN TRACK ACT8
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Vintage: 2000 (2) 2001 (15) 2002 (1) Wafer size: 8" Configuration overview: frame Process o...
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2011 Semitool SST 201 (Cintillio)
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Semitool SST 201 (Cintillio) 1 chamber WAFER SIZE: 8
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2016 KLA-Tencor BF2905 (Optical broadband plasma wafer defect inspectors)
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Installation date: 2016 Down date: 2020 Still installed in Clean room Problem discription: The...
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2001 TEL UnityⅡe855DD
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Vintage: 2001 Wafer size: 8" Configuration overview: 2ch DRM: Process overview: Dry Etch SiN (...
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2001 Hitachi M612A
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Vintage: 2001 Wafer size: 8" Configuration overview: 2ch EC, 2ch AC: Process overview: Dry Etc...
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2003 HITACHI U622
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Vintage 2003 Wafer size: 8" Configuration overview: 2ch Process overview: Dry Etch Oxide Tool...
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2001 TEL UnityⅡe855DS
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Vintage: 2001 (6) Wafer size: 8" (6) Configuration overview: 2ch SCCM: (6) Process overview: D...
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2001 Anelva I-4100SVⅡSR
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Vintage 2001 Wafer size: 8" Configuration overview: 2ch RIE, 1ch Ashing: Process overview: Dry...
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