AMAT P5000
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Process: Preclean Etchx1, Oxide CVD x2 Condition: as is Wafer size: 8"
ASML Yieldstar-S1250
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Process: Overlay Measurement Condition: as is Wafer size: 12"
2004 Rudolph AXI-S
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Process: Macro Defect Inspection Condition: as is Wafer size: 12"
2009 Rudolph MP3 300XCu
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Process: Thickness Measurement Wafer size: 12" Condition: as is
2015 Olympus MK61-F Metallurgical Microscope
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Eye Piece: SWH10 x /26.5 Objective lens: MpanFLN x5 x10 x20 Working Condition



