KLA Tencor Aleris 8350 for 300mm

KLA Tencor F5x for 300mm

(0.2um) 3 ports, 2 SMIF (200mm), 1 open cassette 150 / 200 mm Metrology and Defect inspection N...

(0.4um) 3 ports , 1 port 200mm SMIF, 2 x Ports 300mm Metrology and Defect inspection New Installed

(0.2um) 2 ports 200mm SI wafer on tape Defect Wise ADC (AI ADC)

New Metrology and Defect inspection New Installed

Metrology and Defect inspection New Installed

200 mm (system is new)

(Back Side Etch – comparable to SEZ 203) (looks new)

150 / 200 mm single port

High Resolution Profiler 150 / 200mm Open Cassette (available with Single LPT 2200 SMIF)

(configurable for 200 or 300mm) (dark Field)