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2021 LAM Research Corp. SOLA
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LAM VEXL SOLA MOD.
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1998 LAM 9600 BRME
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200mm
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2012 LAM Research Corp. 2300 E4
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Other Plasma Processing Equipment and Tools
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2013 KOBELCO HRBS
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High Resolution Rutherford Backscattering
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2010 KLA-Tencor EDR 5210
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3 available Vintage:2010 (x3) Tool Status Disconnected Wafer Size 300 mm Fab Section Metrolog...
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2014 Votsch VC 4018
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Vötsch VC³ 4018 Climate Test Chamber (2014) –40°C to +180°C – Tested Excellent condition Full...
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KLA TENCOR PROMETRIX UV-1050
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Advantest V9300 PS800
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PS800 System configuration: Pins 236 ( 23 Cards) MSDPS 48 ( 6 cards) DC/DC 16 AC/DC 5 Manipu...
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2008 KLA-Tencor EDR 5200 SEM
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Tool Status Disconnected Wafer Size 300 mm Fab Section Metrology Model EDR 5200 Vintage 2008 ...
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2000 KLA Tencor AIT II
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4 available 200mm KLA-Tencor AIT II w/ ADC. Defect Inspection Vintage: 2000 (3) 2009 (1)
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2000 AMAT / Varian Semiconductor Equipment Associates (VSEA) EHPi-500
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Mid Current Implanter Ion Implanters Date of Manufacture: 2000-12-01 Currently Configured for:...
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2002 ASML PAS5500/750
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ASML PAS5500/750 DUV Scanner Includes main body, operator console, wafer transfer system, SMIF i...
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